ULVAC LS120A-C dry screw vacuum pump, 120 m³/h, ≤ 0.6 Pa, for clean processes

ULVAC LS120A-C is an oil-free dry screw vacuum pump for clean processes. Pumping speed 120 m³/h, ultimate pressure ≤ 0.6 Pa. Power consumption at ultimate pressure is only 0.6 kW, noise 61 dB(A). The C type has the ECO-SHOCK energy-saving technology and a silencer built in.

The pump belongs to the LS range: LS120A, LS300A, LS600A and LS1200A, each available as C type (clean gases) and L type (with purge for vapours). Inlet KF50 (horizontal) or VG50 (vertical), outlet KF40, water cooling. Three-phase supply: 200 V class (AC 200–240 V) or 400 V class (AC 380–480 V), 50/60 Hz.

Options: MBP inlet flange adaptor, package exhaust port, earthquake-proof bracket, LR compatible unit (inlet, remote), purge gas valve.

Key features:

• No oil in the pumping chamber — clean vacuum
• Ultimate pressure ≤ 0.6 Pa
• Only 0.6 kW at ultimate pressure, built-in ECO-SHOCK
• Low noise — 61 dB(A)
• CE and cTUVus compliant

Specifications:

• Pumping speed: 120 m³/h
• Ultimate pressure: ≤ 0.6 Pa
• Power supply: 3 phase, 50/60 Hz: AC 200–240 V or AC 380–480 V
• Power consumption at ultimate pressure: 0.6 kW (reference)
• Cooling water: > 2.0 L/min
• Noise: 61 dB(A)
• Inlet: KF50 (horizontal) / VG50 (vertical)
• Outlet: KF40
• Dimensions (W×D×H): 311×639×307 mm
• Weight: 142 kg
• Standards: CE, cTUVus

Application: Sputtering and deposition, load locks, turbomolecular pump backing, pumping of clean gases (air, N₂).

Scope of supply: Instruction manual (CD-R), power connector, waterproof cable clamp, remote connector, guard for power connector.

Before ordering: The C type is not leakless and has no purge — for water vapour and volatile liquids choose the L type. Before ordering, specify the process gas, supply voltage class and inlet flange type.