ULVAC LS600A-C dry screw vacuum pump, 600 m³/h, ≤ 0.1 Pa, for high gas load chambers

ULVAC LS600A-C is a medium-to-large model of the LS dry screw pump range for chambers with high gas load. Pumping speed 600 m³/h, ultimate pressure ≤ 0.1 Pa, power consumption at ultimate pressure 1.3 kW, noise 62 dB(A).

Inlet ISO-F 80, outlet KF40, water cooling (water flow above 4.0 L/min), weight 242 kg. The model is also available as L type with 0–50 SLM gas purge and 2.6 kW at ultimate pressure. Three-phase supply: AC 200–240 V or AC 380–480 V, 50/60 Hz.

Options: MBP inlet flange adaptor, package exhaust port, earthquake-proof bracket, LR compatible unit (inlet, remote), purge gas valve.

Key features:

• Pumping speed 600 m³/h
• Ultimate pressure ≤ 0.1 Pa
• 1.3 kW at ultimate pressure
• No oil in the pumping chamber
• CE and cTUVus compliant

Specifications:

• Pumping speed: 600 m³/h
• Ultimate pressure: ≤ 0.1 Pa
• Power consumption at ultimate pressure: 1.3 kW (L type — 2.6 kW)
• Power supply: 3 phase, 50/60 Hz: AC 200–240 V or AC 380–480 V
• Cooling water: > 4.0 L/min
• Noise: 62 dB(A)
• Inlet: ISO-F 80
• Outlet: KF40
• Dimensions (W×D×H): 311×639×563 mm
• Weight: 242 kg
• Standards: CE, cTUVus

Application: Large sputtering chambers, load locks, backing lines.

Scope of supply: Instruction manual (CD-R), power connector, waterproof cable clamp, remote connector, guard for power connector.

Before ordering: The C type is not leakless and has no purge — for vapours choose the L type. Before ordering, specify the process gas, gas load and supply voltage class.