ULVAC MS process dry screw vacuum pump, resistant to corrosive gases and powder

ULVAC MS is a dry screw vacuum pump based on the LS platform with enhanced resistance to corrosive gases and powder (process-resistant version). Powder discharge from the pumping section is improved, and there is no oil in the pumping chamber.

The pump is intended for harsh electronics and chemical processes where the LS C type is not sufficient. Size and materials are selected for the specific process gas; for clean air and inert gases the standard LS is usually sufficient.

Key features:

• Corrosive gas resistant version
• Improved powder discharge
• No oil in the pumping chamber
• Based on the LS dry screw pump platform

Specifications:

• Type: dry screw vacuum pump
• Platform: LS
• Version: resistant to corrosive gases and powder
• Oil in pumping chamber: none
• Size and materials: per process gas

Application: Harsh electronics and chemical processes with corrosive gases and powder formation.

Before ordering: Before ordering, specify the composition and flow of process gases, presence of powder and condensate, and required pumping speed — these determine pump size and materials.