ULVAC Qulee residual gas analyzer for vacuum chamber monitoring

ULVAC Qulee is a residual atmosphere and process gas monitor for vacuum chambers. It monitors gas composition, leaks and contamination in the chamber.

The configuration is selected by mass range and connection flange.

Key features:

• Monitoring of residual atmosphere and process gas composition
• Detection of leaks and contamination
• Configuration by mass range and flange

Specifications:

• Type: residual gas analyzer / process gas monitor
• Monitored parameters: gas composition, leaks, contamination
• Configuration: by mass range and flange
• Monitored object: vacuum chambers

Application: Deposition systems, vacuum chamber diagnostics, R&D.

Before ordering: Before ordering, specify the required mass range, flange type and chamber operating pressure.